NanoAce 4220-Transparent background

NanoAce 4220 fully automatic dicing saw

The NanoAce 4220 Fully Automatic Dicng Saw is a newly developed 8" fully automatic dicing saw, equipped with dual facing spindles that can dice workpieces simultaneously at high throughput, a vision alignment system and high resolution closed loop linear positioning encoders in Y axes where high performance tolerances are required.

 

This machine is highly cost-effective due to its rapid dicing speed and fully automated operation. It features an auto-alignment function, auto kerf check function, self-adjustment function, and statistical analysis function. A high-power spindle is also available for this machine.

 

The performance of the NanoAce 4220  is underpinned by a new Loadpoint NanoControl control system, which is equipped with a user-friendly 17" LCD touch screen and operated through an intuitive new user interface.

Max. Work Capacity (X, Y, Z) Φ8 inch
Blade Capacity OD 49mm – 60mm
Chuck-type Ceramic or metal vacuum
Spindle Options 1.8kW, 6,000 – 60,000rpm as standard, or 2.2kW 6,000 – 60,000rpm
Dimensions (W x D x H) 1375mm x 1430mm x 1950mm 

Dicing solutions for:

SEMICONDUCTORS
OPTICAL
ELECTRONICS
MEDICAL
FERRO-ELECTRONICS
SOLAR
OPTO-ELECTRONICS
SONAR

From Prototype to Production and Everything In-between

  • FROM THE LATEST WAFER DESIGNS TO CERAMIC COMPONENTS AND EVERYTHING IN BETWEEN
  • WITH THE MAXIMUM STROKE OF 30MM IN THE Z AXIS, THE NANOACE FULLY AUTOMATIC DUO PRO HAS ALL DICING REQUIREMENTS COVERED
  • TOTAL FLEXIBILITY, TOTAL CONTROL
FA Nano

OPERATIONAL SPECIFICATION

Control System Loadpoint NanoControl 3.0
Work Holding Ceramic or Metal Vacuum Chuck
Work Capacity (XYZ)  Wafer:8"
Square:140 x 140 x 4mm(full cut)
                   140 x 140  x 6mm(partial cut)
Blade Capacity (Outer Diameter)  49mm – 60mm
Spindle Power  1.8 KW @ 60,000 rpm
X Axis Cutting Range  210 mm
X Axis Resolution  0.1 µm
X Axis Feed Rate  0.01 - 1000 mm/s
Y Axis Index Range  0.001 - 210 mm
Y Axis Resolution  0.1 µm
Y Axis Index Accuracy  Within 2μm / 210 mm
(Single step accuracy) with 2μm / 5 mm
Z Axis Index Range  0.001 - 30mm
Z Axis Resolution  0.1µm
Z Axis Index Accuracy  Repeated positioning accuracy: 1 μm
Theta Axis Drive   Direct Drive Torque motor
Theta Axis Range  380°(continuous)
(-60°~320°)
Theta Axis Resolution  ±3.0 Arc sec
Camera Type  Monochromatic
Camera Alignment  Manual or fully automatic
Camera Resolution  2 MegaPixels
Camera Magnification x48 - x96 - x386
Camera Illumination  Coaxial and ring
Footprint (WDH) (height includes status light)  1375mm x 1430mm x 1950mm

SERVICE REQUIREMENTS

Electricity  - 380v AC ±10% three phase 20A, 50/60Hz
Air supply 5 - 8 Bar 
  650 L/min
Blade coolant 3 - 4 Bar
 

Cutting Water 6 L/min

Workpiece wash 3 - 4 Bar
  Wash water 6 L/min
Spindle coolant 3 - 4 Bar
  Same as ambient room temperature
  4L/min
Vacuum supply  Not required, internally generate
Mist extraction  ≥5.0m³/min
Drain Connecting pipe OD  Φ 38mm
  Drain pipe height from ground < 550 mm
Recommended Environment 

Ambient temp(22±2)℃

Fluctuation:±1℃

Ambient humidity:(55±15)%RH

Weight  2100KG on 4 adjustable feet

 

PIPE SIZES

Port Pipe Diameter
Cutting Wheel Blade Coolant In 16mm
Wafer Wash Water In 12mm
Spindle Coolant Water In  10mm
Spindle Coolant Water Out 10mm
Air In 12mm
Vacuum Venturi Exhaust Merges into main exhaust
Mist Extraction Port  Φ 101mm
Drain Port

Connecting pipe OD:  Φ 38mm

Factory drainage outlet: ≥ Φ 50mm

Max. distance from machine: ≤2m

Talk to us about your requirements

STANDARD PACKAGE 

Loadpoint Air Bearing Spindle

  • Very low vibration improves the cut quality and reduces chipping
  • DC brushless drive, 1.8 kW 60,000 rev per min
  • High power option 2.2 kW 60,000 rev per min

Vision & alignment system & Cleaning system 

  •  Manual and automatic alignment modes 
  • Monocular video alignment system with pattern recognition
  • Automatic alignment as standard
  • Automatic cutting & kerf check as standard
  • Full 17” touch screen monitor for alignment, data entry and machine monitoring
  • Continuous live display of X,Y,Z and theta co-ordinates
  • Z autofocus set up of alignment image with offset option
  • Built-it automatic wafer cleaning station, wash and dry 
  • Automatic, consistent wafer transfer system 

Tooling

  • Standard wheel carrier with 60 mm diameter blade capacity
  • Three direction coolant delivery; main blade coolant jet, blade side wash bars and wafer flood jets
  • Cleaning station with atomised cleaning features
  • Accelerometer based Z datum set, off-chuck height sensing system

Z height sensing

Off-chuck height sensing system ensures constant depth of cut without having to use conductive blades, providing a wider choice of blade diameters and suppliers.

Work holding

 Standard packages include adaptable plain wafer vacuum chuck for use with 8'' and 6'' film frames.  

Materials Processed

Ceramic, FR3/FR4, GaAs, Germanium, Glass, InP, LED’s, Lithium Niobate and Tantalate, QFN, Piezo electrics, PZT, Quartz, Sapphire and Silicon amongst others.

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